|3D-Micromac AG is the industry leader in laser micromachining. We develop processes, machines and turnkey solutions at the highest technical and technological level. |
3D-Micromac systems have been successfully implemented in various high-tech industries worldwide. This includes semiconductor, photovoltaic, electronics, micro diagnostics, glass and display industry. Our aim is to provide superb customer satisfaction even for the most complex projects.
For semiconductor industry, 3D-Micromac continuously works on innovative laser processes and solutions that are not only ensuring but also further enhancing semiconductor device yields. 3D-Micromac machines help to add more functionality on devices within a smaller footprint. With its microDICE laser micromachining system 3D-Micromac addresses critical needs of the semiconductor industry by leveraging TLS-Dicing (thermal laser separation) for wafer dicing. With its microPRO OCF 3D-Micromac also offers a selective laser annealing system for ohmic contact formation (OCF) in silicon carbide (SiC) power devices.
09126 Chemnitz - Germany
Phone: +49 371 40043-922
|Headquartered in Fremont, California, Aehr Test Systems is a worldwide provider of test systems for burning-in and testing SiC and GaN power devices, logic, optical and memory integrated circuits and has installed over 2,500 systems worldwide. Increased quality and reliability needs of the Automotive and Mobility integrated circuit markets are driving additional test requirements, incremental capacity needs, and new opportunities for Aehr Test products in package, wafer level, and singulated die/module level test. Aehr Test has developed and introduced several innovative products, including the ABTSTM and FOX-PTM families of test and burn-in systems and FOX WaferPakTM Aligner, FOX-XP WaferPak Contactor, FOX DiePak® Carrier and FOX DiePak Loader. |
• The FOX-XP and FOX-NP systems are full wafer contact and singulated die/module test and burn-in systems used for burn-in and functional test of complex devices, such as leading-edge memories, digital signal processors, microprocessors, microcontrollers, systems-on-a-chip, and integrated optical devices.
• The FOX-CP system is a new low-cost single-wafer compact test and reliability verification solution for logic, memory and photonic devices and the newest addition to the FOX-P product family.
• The WaferPak contactor contains a unique full wafer probe card capable of testing wafers up to 300mm that enables IC manufacturers to perform test and burn-in of full wafers on Aehr Test FOX systems.
• The DiePak Carrier is a reusable, temporary package that enables IC manufacturers to perform cost-effective final test and burn-in of both bare die and modules.
• The ABTS system is used in production and qualification testing of packaged parts for both lower power and higher power logic devices as well as all common types of memory devices.
|Aehr Test Systems
400 Kato Terrace
Fremont, CA 94539 – USA
|AIXTRON is a leading provider of deposition equipment to the semiconductor industry. The Company's technology solutions are used by a diverse range of customers worldwide to build advanced components for electronic and opto-electronic applications based on compound semiconductor materials as well as carbon nanotubes (CNT) and other 2D nanomaterials. Such components are used in fiber optic communication systems, wireless and mobile telephony applications, optical and electronic storage devices, computing, signaling and lighting, as well as a range of other leading-edge technologies.|
AIXTRON’s product portfolio includes:
• MOCVD Equipment based on the Planetary Reactor® or Close Coupled Showerhead® concept for compound semiconductor materials.
• Warm-Wall CVD systems for high-temperature SiC applications and research systems.
• MOCVD, CVD and Plasma Enhanced CVD systems for the deposition of carbon nanotubes and nanofibers.
52134 Herzogenrath - Germany
Phone: +49 2407-9030-0
|Annealsys manufactures Rapid Thermal Processing and Chemical Vapor Deposition systems for R&D and production. Process service is also available.|
RTP / RTPCVD systems with vacuum and high temperature capability up to 2000°C. Pulse annealing for processing thermally sensitive substrates. Applications: contact annealing, oxidation, CVD of graphene and h-BN, selenization, silicon carbide implant annealing.
DLI-CVD / DLI-ALD systems with direct liquid injection (DLI) vaporizers for deposition of materials using the widest range of organometallic precursors. Multi process capability 2-inch system: DLI-CVD, DLI-ALD and RTP inside the same chamber. Applications: multi-metallic oxides, metals, nitrides, 2D materials.
Annealsys represents Veeco-CNT for ALD systems.
139 rue des Walkyries
34000 Montpellier - France
Phone: +33 (0)4 67 20 23 63
|Beneq is the home of ALD, offering a wide portfolio of equipment products and development services. Today Beneq leads the market with innovative solutions for advanced R&D (TFS 200, R2), flexible high-volume manufacturing (BENEQ TransformTM), ultra-fast high precision spatial ALD coatings (C2R), roll-to-roll thin film coating of continuous webs (WCS 600), and specialized batch production for thicker film stacks (P400, P800). Headquartered in Espoo, Finland Beneq is dedicated to making ALD technology accessible for researchers and enabling technology mega trends through engineered ALD materials solutions.||Beneq
02200 Espoo - Finland
Phone: +358 9 7599 530
|CAMECA is a world leading supplier of metrology solutions for semiconductor manufacturing as well as high-performance microanalytical instrumentation for materials research. Our Secondary Ion Mass Spectrometers (SIMS) instruments are used to detect the presence of impurities or analyze critical interfaces in DRAM, 3D NAND flash device, to control dopant doses in logic source and drain and perform depth-profiling of ultra-shallow implants. Our LEAP® Atom Probes perform atomic scale quantitative 3d mapping of dopant distributions, measurement of clustering at interfaces... Both product lines have been widely adopted by leading research institutes and major semiconductor manufacturers around the world. Now a business unit of the AMETEK Materials Analysis Division, CAMECA is headquartered near Paris, France and has locations in the US, Germany, India, China, Taiwan, Korea and Japan.||CAMECA
29 Quai des Grésillons
92622 Gennevilliers - France
Phone: +33 (0)1 43 34 62 50
|Centrotherm has been developing and realizing innovative thermal solutions for over 70 years. As a leading and globally operating technology group, we offer comprehensive production solutions for the semiconductor and microelectronic industries. In the field of 150 mm SiC processing, centrotherm has an outstanding reputation. It has been selected and qualified as technology provider for REACTION – First and European SiC eight inches pilot line.|
Our equipment is designed for all needs from R&D to mass production and applicable for various semiconductor technologies and applications, such as logic and memory devices (e.g. Flash, DRAM), power semiconductors (e.g. Si, SiC), LED, SMT, MEMS or sensor technology. The centrotherm product portfolio comprises horizontal (up to 300 mm wafer diameter) and vertical batch furnaces (atmospheric or vacuum processes), high temperature furnaces (annealing up to 2000°C, oxidation up to 1500°C), single wafer systems (RTP, low-temperature microwave oxidation).
Additionally we offer vacuum soldering systems and conveyor furnaces for thermally activated processes, such as thick film processes (drying and sintering) or DCB (remelting and connection), LTCC and MLCC manufacturing (firing).
|Centrotherm International AG
Württemberger Str. 31
89143 Blaubeuren - Germany
Phone: +49 7344 918 0
|Ceramicforum has been involved in the SiC market in Japan since the early 2000s starting out as a distributor of substrates, later also offering epi- and device prototyping services through our partners. Meanwhile, we have extended our portfolio to include other wide-bandgap semiconductors such as GaN and offer DLTS and Hall effect measurement services to customers worldwide. We also offer our in-house developed “CT Series”, a line of crystal evaluation equipment. More recently, we started representing select Japanese machine manufacturers in Europe and the US such as EpiQuest (e.g. KOH Etching Machines) and Toyo Advanced Technologies (SiC wire saw machinery).||Ceramic Forum Co., Ltd.
3rd Kusumoto Bldg., 3-19-6 Kanda, Nishiki-cho, Chiyoda-ku, Tokyo, 101-0054 Japan
|Clas-SiC Wafer Fab is the world’s first dedicated open 150mm foundry to manufacture Silicon Carbide power devices, where we operate from our custom built and fully fitted out Class 100 clean room facility, in Fife, Scotland, UK.|
With over 200 man-years of silicon carbide technical know-how, Clas-SiC combines the best and most experienced talent in the industry, state of the art Silicon Carbide facilities & unique design to manufacture processes to drive innovation in the semiconductor power industry.
Clas-SiC offering provides fast prototyping cycle times for SiC wafer fabrication to accelerate R&D and time to market for new device designs through process design kits (PDK) and a library of “off the shelf” Process Module IP which have been created to minimise technical risk, minimise NRE/cost and optimise both R&D cycles and manufacturability.
In addition to the above, Clas-SiC offer individual subcontract processing services for a variety of processing stages such as SiC hot ion implant, SiC carbon cap implant anneal, Rapid Thermal Anneal, etc.
|Clas-SiC Wafer Fab Ltd
Avenue Industrial Estate
Lochgelly KY5 9HQ - United Kingdom
Phone: +44 (0)1592 373601
|CMC Materials, Inc. is a leading global supplier of consumable materials to semiconductor manufacturers. Our products play a critical role in the production of advanced semiconductor devices, helping to enable the manufacture of smaller, faster and more complex devices by our customers. CMC Materials’ mission is to create value by delivering high-performing and innovative solutions that solve its customers’ challenges.||CMC Materials, Inc.
870 N. Commons Drive
Aurora IL 60504 - USA
|Many of the specialty process gases used in semiconductor wafer processing and other manufacturing industries are either pyrophoric, toxic, or corrosive. Unused process gases and hazardous by-products must be removed efficiently and safely from exhaust lines to ensure safety of personnel, compliance with regulatory emission standards, and process uptime.|
CLEANSORB® dry chemisorber media removes hazardous process gases by chemical conversion to stable solids at ambient temperature, and is the enabling technology for the CS CLEAN SOLUTIONS dry scrubbing product line. No external heating, moisturization, or other facilities are required for operation. The chemisorption reaction between gas and absorbent is irreversible, ensuring that hazardous gases are bound in solid form and cannot be re-released.
After removal from the CLEANSORB cabinet, the column is ready for shipment to the nearest CS CLEAN SOLUTIONS Refill and Service Center. There, the absorber columns are cleaned, refilled, checked-out and tested in accordance with local or national regulations. Where possible, the spent materials are re-processed for recovery of metals, or for other industrial uses.
Our dry scrubbing resins are subject to permanent quality control procedures and ongoing R&D work to keep abreast of emerging semiconductor process recipies and chemistries.
|CS CLEAN SOLUTIONS AG
85737 Ismaning - Germany
|DISCO is a total solution provider for Dicing (Kiru), Grinding (Kezuru) and Polishing (Migaku) technologies. |
KABRA is our new solution for SiC wafer production that can overcome the issues with the conventional wire saws. KABRA process includes SiC ingot slicing by laser, and precision grinding of ingot and split wafer sides. Advantages are more wafers obtainable from one ingot due to less material loss, no need of lapping process, and much faster processing time.
|DISCO HI-TEC EUROPE GmbH
85551 Kirchheim b. München - Germany
Phone: +49 (0)89 90903-0
|Entegris is a leader in specialty chemicals and advanced materials solutions for the microelectronics industry and other high-tech industries. Entegris material suite includes Supersic, a unique process that yields high purity SiC , in alignment with our mission of contamination control. Sinmat the latest addition to Entergris business capabilities is a leader in the design and production of Chemical Mechanical Planarization (CMP) slurries used for polishing ultra-hard surface materials, including SiC and GaN. The combination of Sinmat’s slurry technology with Entegris broad capabilities in CMP cleans, filtration and applications technology enable new solutions for CMP customers.||Entegris | Sinmat
950 W. Elliot Road - Suite 114
85284 Tempe, Arizona - United States
Phone: +1 800 394 4083
|To meet the need for larger epi-wafers, Epiluvac has developed the first commercially available SiC epitaxy reactor for up to 200 mm (8”) wafers, the “Epiluvac ER3”. It offers features like automatic hot wafer loading/unloading for high throughput and fine tuning of cell temperature for best possible uniformity. The new reactor can be configured in single or multiple chamber configurations which enables upscaling of capacity or sequenced wafer processing.|
Epiluvac is a Swedish company founded by a team of former Epigress/Aixtron engineers. The company offers CVD reactors for Wide Band Gap (WBG) semiconductors. Main applications are epitaxial growth of silicon carbide (SiC) and gallium nitride (GaN). The engineering team has decades of experience from research and development of CVD reactors and especially hot-wall CVD tools for SiC epitaxy. Epiluvac provides standard as well as customized reactor solutions and a wide range of service and maintenance packages.
Ideon Science Park, Delta 6
SE-22370 Lund - Sweden
Phone: +46 462 88 02 20
|EtaMax was founded in 2008 with the mission to "Be the Best in Optical Measurement Field", we are developing and manufacturing optical inspection systems used in the compound semiconductor industry. Today, PLATO, EtaMax’s Photoluminescence Mapping System used for optical analysis of compound semiconductor epitaxial wafers, is leading the global market.|
We are going to introduce MiPLATO-SiC, a photoluminescence intensity mapping machine for SiC analysis. MiPLATO-SiC uses a high-speed rotation stage(1800RPM) for fast 2D sweep, and spectral mapping for defective areas or entire wafers is also possible.
|EtaMax Co., LTD
280-17, Saneop-ro 155 beon-gil,
Gyeonggi-do, 16648, Korea
Phone: +82 70 4860 9403
|The Fraunhofer Institute for Integrated Systems and Device Technology IISB conducts applied research and development in the field of electronic systems for application in, e.g., electric mobility, aerospace, Industry 4.0, power grids or energy technology. In this connection, the institute uniquely covers the entire value chain - from basic materials to whole power electronic systems (for detailed information visit our research areas).|
As part of the Fraunhofer-Gesellschaft, the IISB does contract research for industry as well as public authorities. On that note it is the institute’s main objective to provide excellent research for its industrial partners and to set technological benchmarks as one of the leading research institutions in electronic systems. A tightly woven network build out of local and international partnerships and cooperations helps to carry these aims into effect.
With its two business areas, semiconductors and power electronics, the IISB provides innovation and solutions in various specialized fields:
• materials development
• semiconductor technology and manufacturing
• electron devices
• packaging and modules
• vehicle power electronics
• energy electronics and energy supply systems
These services are supplemented by broad activities in test and reliability, simulation, characterization, and metrology.
In addition to silicon technology, the IISB has a strong focus on wide-bandgap semiconductors, especially silicon carbide (SiC). For SiC, the institute offers a complete technology backbone, including materials science, devices, modules, and their integration in highly efficient power electronic systems.
91058 Erlangen - Germany
Phone: +49 9131 761 0
|GT Advanced Technologies manufactures CrystX® silicon carbide for producers of wafers and power electronics. We currently produce high quality 150 mm 4H Nitrogen-doped, slicing-ready pucks and will be introducing 200 mm N-Type pucks in 2022. Also in 2022 GTAT will be introducing semi-insulating CrystX® silicon carbide. GTAT is expanding production capacity by 60% in 2021 alone, with additional expansion to follow. GTAT’s aggressive quality improvements are key to accelerating adoption of SiC in key global industries such as electric vehicles and other power-electronics applications.||GT Advanced Technologies
5 Wentworth Drive, Unit 1
Hudson, NH 03051 - USA
Phone: +1 603.883.5200
|For thirty years, IBS has assembled the expertise, tools and skills required to meet the diverse implantation needs of global clients. Every year, the company continues to develop this technology to keep pace with the growing needs of the industry: implantation expertise.|
Additionally, the development of services dedicated to equipment maintenance and spare parts has naturally led IBS to be able to respond to almost any implant related challenge. Knowledge and mastery of a wide variety of equipment types and vintages also gives IBS the capability to propose innovative and cost saving upgrades and retrofit services.
IBS’s positioning as a manufacturer of new-generation equipment, such as PULSION® and IMC™ validates its leadership in ion implantation technology, and offers its clients unique expertise to accompany them effectively in facing today’s and tomorrow’s challenges.
ZI de Peynier Rousset
Rue Gaston Imbert prolongée
13790 Peynier - France
Phone: +33 (0)4 42 53 89 53
|ITES Co.,Ltd. was established in 1993 as a spin-off from IBM Japan's semiconductor quality assurance division. ITES has always been exploring the truth of what is happening in the microscopic world with "Passion for Truth" as its corporate philosophy. Currently, we are developing two major businesses: a semiconductor failure analysis service and reliability testing service, and development of inspection equipment using PL(photoluminescence) and EL(electroluminescence) methods. At the|
ECSCRM2020-2021 international conference, we will introduce various SiC crystal defect inspection services focusing on the detection of BPD, which is a killer defect of SiC, especially BPD in the buffer layer, using sophisticated PL techniques.
|ITES Co., Ltd.
800 Ichimiyake, Yasu-shi
|Silicon carbide substrates for high power devices|
Bipolar degradation is limiting the reliability of silicon carbide devices in high voltage classes. By growth of device structures on substrates without planar dislocations, one can avoid bipolar degradation. Kiselkarbid i Stockholm AB has developed a proprietary method and established a system for volume production of 150mm size n-type substrates with no micropipes, no planar- and low threading dislocation densities. The substrates have no facet, and the resistivity is low and uniform. Wafer bow and TTV are lower than 5µm and warpage less than 15µm. The company is currently developing 200mm size substrates of the same quality planned to be introduced on the market during the second quarter of 2022.
|Kiselkarbid i Stockholm AB
KTH Electrum, Kistagången 16
Box 228, 164 40 Kista, Sweden
|KLA Corporation is a leading supplier of process control and yield management solutions for the semiconductor and related nanoelectronics industries. KLA’s products and services are used by bare wafer, IC, reticle and other manufacturers of materials and equipment around the world, from research and development to final volume manufacturing. Products and services include inline unpatterned and patterned wafer defect inspection, review and classification; reticle defect inspection and metrology; packaging inspection and die sort; critical dimension (CD) metrology; pattern overlay metrology; film thickness, surface topography and composition measurements; measurement of in-chamber process conditions; wafer shape and stress metrology; computational lithography tools; and, overall yield and fab-wide data management and analytics.||KLA
Three Technology Drive
Milpitas, California 95035
|Lasertec Corporation, founded in 1960, has grown into a world leading innovator of inspection and metrology equipment serving the global semiconductor and related industries. Guided by its corporate philosophy, “Create unique solutions; Create new value,” Lasertec has created several new tools to help companies developing and manufacturing the next generation of wide band gap semiconductors. Tools being highlighted at ECSCRM2017 are SICA88, and GALOIS. SICA88 is a confocal/DIC based inspection/analysis tool not only capable of detecting all the critical defects at high sensitivity but also automatically classify killer defects optimizing to enable the highest yielding devices. GALOIS is the latest addition to the inspection/analysis tool portfolio for customers who deal with GaN and other transparent substrates.||Lasertec Corporation
2-10-1 Shin-yokohama, Kohoku-ku
Yokohama, 222-8552, Japan
|LayTec company profile LayTec is a major provider of integrated metrology for thin-film deposition and other high value generating processes. LayTec’s equipment is used in a broad range of applications like optoelectronics, electronics, PV, displays, optics and photonics, SEMI and flash memory production, automotive industry and others. LayTec’s integrated metrology tools provide access to all key parameters during deposition processes in real-time – either in-situ during the process or in-line during substrate transfer between deposition chambers.|
In combination with software packages for SPC (statistical process control) and APC (advanced process control), LayTec’s metrology allows for fab-wide optimization of processes and film quality, better production efficiency, high yields and reduced costs. In addition, LayTec metrology tools are of crucial importance in the R&D labs of research organizations where new materials, processes and device structures are developed.
Learn more at www.laytec.de
Seesener Str. 10-13
10709 Berlin, Germany
|LPE was founded in Milan in 1972. Introducing the first induction heated EPI Reactor capable to growth very thick, high quality epitaxial layer, LPE contributed to the European semiconductor industry development in the power discrete devices production. |
Almost fifty years later LPE have grown to be worldwide recognized leader supplier for Silicon and Silicon Carbide Epitaxial reactor manufacturer.
Today more than 400 Silicon Reaction Chambers in operation, nearly 80 Silicon Carbide Reactors sold, worldwide Customer base, Sales and Service organization in 10 countries. R&D cooperation with European Universities on processes and materials for power electronic.
Via Falzarego, 8
20021 - Baranzate (MI) - Italy
|Based in Switzerland Meister Abrasives AG is a highly innovative company with extensive experience in designing and manufacturing customized superabrasives fine grinding wheels. |
Hybrid and ceramic bonded grinding tools represent a quantum leap in quality and reliability in semiconductor processing. Meister's diamond grinding tools are used for the fine grinding of wafers and for wafer dicing. With best in class TTV values, surface qualities in the one digit Angstrom range are achieved.
The specially developed grinding tools from Meister are used for processing materials such as Si, SiC, sapphire, GaN, InP, GaAS, LnNb, LnTa and extreme hard ceramics. Meister's innovative Ultra Fine 6 (UF6) grinding wheel technology can help prime wafer and device manufacturers shorten wafer preparation steps to the minimum. The ultra-smooth surface profile achieved with this method enable manufacturers to avoid diamond slurry costs, reduce CMP cost tremendously and drastically increase throughput.
|Meister Abrasives AG
8450 Andelfingen - Schweiz
Phone: +41 52 304 22 22
|A global expert in electrical power and advanced materials, Mersen designs innovative solutions to address its clients’ specific needs and enable them to optimize their manufacturing performance. |
Mersen’s 6,400 employees operating in 35 countries provide purpose-designed solutions bespoke to customer requirements anywhere on the planet.
Our material expertise on graphite, carbon insulation, carbon/carbon composite, flexible graphite and silicon carbide (SiC) gives us the possibility to engineer enhanced solutions for demanding applications such as industrial processes for semiconductors – crystal growth and wafer processing notably -, aerospace, solar PV, LEDs, as well as in energy storage.
41 rue Jean-Jaurès
92239 Gennevilliers - France
|mi2-factory GmbH sells a novel, in-house developed process technology: Energy Filtered Ion Implantation (EFII) in combination with the production machine EFIITRON. Microchip producers buy EFII for cost saving, performance increase and design innovation in semiconductor power device manufacturing for chips that are applied in the fields: Electro Mobility, Photovoltaic, Wind Power, Traction, Industrial Drives and Grid.|
For specific Silicon carbide (SiC) power devices a cost-reduction of up to 50%/wafer is achievable.
mi2-factory’s Energy Filter for Ion Implantation (EFII) technology can be combined with a Layer Transfer (LT) process, which allows to develop a novel type of low cost, device-ready, engineered SiC substrate. This novel approach allows for extremely low substrate cost and for elimination of the epitaxy process, which drastically reduces chip manufacturing cost for power device applications in the 600V, 1200V, and up to 3.3kV voltage classes.
07745 Jena - Germany
Phone: 0049 3641 2719321
|Nanotronics is a science technology company that has redefined factory control through the invention of a platform that combines AI, automation and sophisticated imagining to assist human ingenuity in detecting flaws and anomalies in manufacturing, an industry that has been stagnant since the 1950’s. Deployed across eight countries and industry agnostic, we work with leading-edge companies - from aerospace, to electronics, to healthcare - to drive up yield, reduce footprint and waste, lower costs, and speed up design iteration. |
Nanotronics is a key player in helping to solidify New York’s role as a global center of the innovation economy. We are currently building New York’s first high tech manufacturing hub in the Brooklyn Navy Yard, with expected completion in Q2, 2020.
19 Morris Avenue
Brooklyn, NY 11205 - USA
Phone: +1  207 9959
|Nippon Kornmeyer Carbon Group (NKCG) is a company jointly operated by the shareholders of Kornmeyer Carbon-Group (Germany) and Nippon Carbon Co. Ltd. (Japan), a Tokyo stock exchange listed carbon manufacturer. NKCG specializes in design and modelling, manufacturing, purification and several kind of surface coatings as well technical support of carbon-based and other ceramic materials. Decades of experience in the semiconductor industry, material know-how combined with scientific expertise enables us to be a reliable partner along the entire process chain.||Nippon Kornmeyer
Carbon Group GmbH
Im Nassen 3
53578 Windhagen - Germany
Phone: +49(0) 2645 95 25 0
E-mail : email@example.com
|Nissin Ion Equipment aims at promoting a development-based business through the manufacture of various equipment at the core of which are proprietary ion beam and plasma technologies.|
We has addressed the needs brought about by the rise of environmental awareness into our equipment development and marketing with a high temperature ion implanter for mass production.
This product is for the manufacture of semiconductor power units that are attracting attention in their application withelectric power equipment due to their ability to more efficiently handle high voltages and high currents in comparison with conventional semiconductor devices.
Such semiconductor power devices are also being used in EV and HEV vehicles and home appliances for the purpose of saving energy.
|Nissin Ion Equipment Co., Ltd.
4F GRAND KYOTO, 75,
Nishikujo Higashihieijo-cho, Minami-ku,
|NOVASiC provides SiC epitaxy and wide bandgap polishing services. NOVASiC also provides 4H-SiC on 4H-SiC and 3C-SiC epitaxy on silicon - useful templates for nitride growth. We specialize in high-quality polishing of SiC, GaN, AlN, Ga2O3, diamond, ZnO... |
Our polishing is widely recognized as the industry's benchmark. NOVASiC provides reclaim, planarization and thinning services - from removing as little as 1.000 Å to thinning substrates to 150 microns, or even less.
NOVASiC’s headquarters are in the French Alps, near Grenoble.
Allée du Lac d'Aiguebelette
73375 Le Bourget du Lac Cedex - France
Phone: +33 (0)4 79 65 97 20
|NuFlare Technology, Inc. was founded in 2002 as a spinoff of Toshiba Machine Co. Ltd. Since that time, we have developed and provided state-of-the-art electron beam mask writers, mask inspection systems and epitaxial growth systems for the manufacture of semiconductor devices, thereby contributing to the development of the semiconductor industry.|
Epitaxial growth systems for power devices are expected to find more widespread use in electric vehicles (EVs) and other applications.
Epitaxial growth systems are currently moving from the development phase to use in practical applications.
For manufacturing of power devices based on 4H-SiC, CVD tools of excellent uniformity of both thickness and carrier concentration on n-type homo-epitaxial films as well as of high productivity have been required. We have developed a CVD tool,"EPIREVO S6", based on high speed wafer rotation technology which is suitable for achieving high in-wafer uniformity and high growth rate.
|NuFlare Technology, Inc. (NFT)
8-1, Shinsugita-cho, Isogo-ku
Yokohama-shi, 235-8522 Kanagawa - Japan
|OMEGA PHYSICS is a new French company dedicated to help research centers and companies involved in physics research (electronics, particle accelerators, materials...) through the supply of following products and services: |
Multi-roots dry vacuum pumps by KASHIYAMA, Turnkey RF, vacuum, cryogenic or magnetic system according to your need, Particle accelerators and ion implanters science & technology consulting, Business growth hacking...
Our 4 branches of DNA are Physics science, Engineering, Industry, Global sales.
Our customers are from Physics research centers, Particle accelerators, Medical devices (Hadron-therapy, MRI, Radio-isotopes production), Semiconductor manufacturing, Ion implantation, Metallurgy, Surface treatment, Vacuum and plasma processing, Nanotechnologies.
56730 Saint Gildas de Rhuys - FRANCE
Phone: +33 (0)667 363 611
|We aim to strengthen import-export and overseas business development. Our strength is to be able to develop the business of all electronic materials through the human network regardless of domestic and overseas.|
In particular, we will specialize in the next generation semiconductor power devices.
This time, we will exhibit power devices such as SiC single crystal Wafer and SiC epitaxy Wafer, as well as materials supporting 5G devices.
|OS TECH CO., LTD.
Osaka Japan 590-0023
|For 130 years, the name Pfeiffer Vacuum has served as a guarantee for advanced vacuum technology, high quality vacuum solutions and first-class service.|
Pfeiffer Vacuum is at the origin of the invention of many products in the vacuum field.
Its equipment and components are used to generate a clean and dry vacuum, to test the tightness of industrial installations and equipment, to measure level of vacuum and to carry out gas analyses in the fields of research and industrial process.
Pfeiffer Vacuum provides itself with the means to provide each customer with an optimal and adapted vacuum solution. The group tends to maintain its Research and Development momentum, in order to maintain excellence and be an industrial reference based on high-tech products. The main products are developed in our R&D departments (Asslar and Annecy) and are subjected to numerous tests before being marketed.
In order to best meet customer demand, Pfeiffer Vacuum ensures that its commitments in terms of sustainable development, quality and safety are met.
The group is proud to highlight its two certifications: ISO 9001 (quality management) and 14001 (environmental management). Thanks to its desire to provide increasingly eco-responsible products, eco-design has been introduced into the production process.
|PFEIFFER VACUUM SAS
98, avenue de Brogny - BP2069
74009 Annecy Cedex - France
|Plasma-Therm is a global manufacturer of advanced plasma-processing equipment, provides etch, deposition, and plasma dicing technologies used in semiconductor packaging, solid-state lighting, power, data storage, renewable energy, MEMS, nanotechnology, photonics, and wireless communication markets.|
Plasma-Therm's products have been adopted globally and earned their reputation for value, reliability, and world-class support.
10050 16th St. North
St. Petersburg, FL 33716 - United States
Phone: +1 727 577 4999
|PR Hoffman Machine Products Inc. is a manufacturer of double sided and single sided Lapping and polishing machines, lapping and polishing carriers and single side polishing templates. Our newest line of double side and single side processing equipment is designed specifically with all the essential options and controls for Silicon Carbide DSP and CMP processing. We have worked closely with the materials engineers to ensure our new equipment will offer a premium wafer and competitive cost of ownership. PR Hoffman offers experienced sales and engineering staff to help you customize the best solution for all of your lapping and polishing processing needs. Consumables, offered for all brands of machines, are specifically designed for each customer application to ensure the carriers and templates are providing the best cost of ownership for each customer’s unique process. Our equipment is used across many industries including Compound Substrates, Silicon, Quartz, Ceramics, Optics, Medical and Metals. Since 1938, PR Hoffman has been a leader in the lapping and polishing industry.||PR Hoffman Machine Products Inc.
1517 Commerce Avenue,
Carlisle PA, USA 17015
Phone: +1 717-243-9900
|PTS (Puces Technologies Semiconducteurs) offers a wide business range in several sectors : the semiconductor, the optical disc and the solar energy (photovoltaïc). PTS is a dominant french player thanks to his experience, his know how and to the care quite particularly brought to its customer relationships in those activities :|
- Commercial Follow Up
PTS offers materials, consumables, equipments and process support.
23 rue Paul Héroult
38190 Villard-Bonnot - France
Phone: +33 (0)1 60 93 11 00
|Pureon is a leading provider of surface finishing solutions for high-tech materials. Through a high level of personal interaction, the company offers expertise, consulting, and integrated solutions in all process steps. Its portfolio includes consumables for cutting, grinding, lapping, polishing, and cleaning in the form of diamond micro grains, colloidal silica, suspensions, pastes, polishing cloths, composite polishing pads, and abrasive pads. The company will operate under the new Pureon name following the merger of Microdiamant and Eminess Technologies on May 1, 2021. Pureon is a privately held company based in Lengwil, Switzerland. Its global network of specialized partners and subsidiaries serves customers in around 40 countries in Europe, the USA and Asia.||Pureon AG
8574 Lengwil - Switzerland
|PVA Crystal Growing Systems GmbH / Creating the Purest of Foundations|
With more than 1,000 systems sold and comprehensive technological expertise, we have been supporting our customers in the production of high-purity monocrystals for more than 60 years. The semiconductor, photovoltaics, electronics and R&D industries all benefit from our high-performance systems and comprehensive service offering. Thanks to customized plant design and project execution, we help our customers to grow high-quality crystals that meet your exact needs.
With its SiCma product group, PVA Crystal Growing Systems GmbH has been building and developing one of the most successful, commercially freely available PVT systems for the production of SiC single crystals for over ten years.
Our PVT systems have proven themselves many times over with customers from science and industry. Continuous further development and intensive cooperation with partners from industry and science ensure that the PVT systems always meet the current requirements of the SiC industry.
|PVA Crystal Growing Systems GmbH
Im Westpark 10-12
35435 Wettenberg, Germany
Phone: +49 (641) 68690-189
|RENA – The art of wet processing.|
RENA is the worldwide technological leader for wet processing equipment.
We provide the most valuable, innovative wet-chemical solutions for our clients to reach the next level of state-of-the-art. We manufacture highest quality flexible and high-throughput equipment in the Semiconductor, MedTech, Glass, Additive Manufacturing and Renewable Energy sectors.
We have 7 manufacturing sites, 5 innovation hubs and more than 3.100 machines installed worldwide. We are constantly developing the most efficient process for our clients to achieve perfect surface quality. With more than 130 engineers, 150 global service experts at 20 service locations we work to make RENA machines a long-term success story.
|RENA Technologies GmbH
D-78148 Guetenbach - Germany
Phone: +49 (0) 7723 9313-0
|Founded in 1951, this year Rigaku proudly celebrates its 70th year as one of the foremost manufacturers of X-ray analysis, thermal analysis and non-destructive testing instruments. Since the company’s inception, we have continued to develop and grow alongside our customers, always mindful of our mission: to contribute to the enhancement of humanity through scientific and technological development. All of us hope that the work we do today will make the world a better place for the generations that follow, and we give our sincere thanks to our customers for letting us pursue that mission.||Rigaku Europe SE
63263 Neu-Isenburg, Germany
Phone: +49 (0) 6102 7799 951
|Your established specialist for high-temperature technology. |
Since 1996 SCHUPP® Ceramics has been developing, producing and selling high-temperature fibre-based insulation and metallic-ceramic solutions, approved in Si- and SiC-Wafer semiconductor industry.
We provide complex vacuum-formed insulation shapes UltraVac made of polycrystalline mullite/alumina wool to use them in diffusion and CVD furnaces up to 1450°C (2642°F) operation temperature. We are ready to offer vestibule blocks and insulation tubes for all diffusion furnaces.
MolyTec is a customized electric heating system, made of molybdenum disilicide heating elements specially designed for the semiconductor industry. The system permits controlled and precise heating. It is fully compatible with all technically comparable heating systems and can be integrated into horizontal and vertical diffusion furnaces as well as CVD furnace systems.
|M.E. SCHUPP Industriekeramik GmbH
Neuhausstraße 4 10
52078 Aachen - Germany
Phone: +49 (0) 241 93677-0
|Saint-Gobain Abrasives provides a complete portfolio of products that offer powerful, precise and user friendly solutions for every step of the abrasive process. Saint-Gobain Surface Conditioning combines formulation knowledge and material science expertise to transform raw materials into engineered particles, compounds and slurries. Both our businesses enable customers to transform all types of materials even in the most complex and challenging applications across a diverse range of markets. Our portfolio and capabilities integrate the entire process chain from cut to finish. Continual investment in R&D and close collaboration with customers allow us to design custom made solutions meeting the highest productivity and quality standards. From wafer and chip processing to LED’s, and manufacturing of optic electronic parts and device components, our solutions will help you achieving the highest workpiece quality standards.|
Saint-Gobain Abrasives Diamond Tools:
- Edge Grinding wheels (EGW)
- New Prisma Coarse and Fine Fixed Abrasive Vertical Spindle (FAVS)
- Diamond band saw
- Notch Grinding Wheels (NGW)
- Fix Diamond Wire (FDW)
- 1A8 Diamond Dicing
Saint-Gobain Surface Conditioning products:
- Engineered diamonds
- Wiresaw vehicles
- Lapping slurries
- CMP slurries (abrasive / abrasive-free)
12 place de l'Iris
92400 Courbevoie - France
Phone: +33 (0)1 88 54 00 00
|Semilab is a leading metrology equipment supplier for characterization of semiconductor materials. The company offers advanced electrical and optical systems, for both R&D and production control in the semiconductor, photovoltaic, and display technology markets. Technologies for compound and wide bandgap semiconductors include ellipsometry, dopant concentration and profiling, electrical characterization of dielectrics and interfaces, photoluminescence, Raman, mobility, sheet resistance, contamination control, and atomic force microscopy. Electrical techniques include both contact and non-contact solutions, and all are offered in a range of platforms from smaller manual type tools to fully automated production control systems with high-resolution imaging.||Semilab Semiconductor Physics Laboratory Company LTD.
Prielle Kornelia U.4/A
1117 Budapest - Hungary
Phone: +36 1 505 4690
|We are leaders in the development and manufacture of products based on carbon, graphite, carbon fibers, and fiber-reinforced composites. In partnership with our customers, we develop intelligent, trendsetting, and sustainable solutions that deliver a clear benefit.|
With our in-depth material, engineering, and application know-how, we make a substantial contribution to the major future topics mobility, energy, and digitization.
Our specialty graphites for the semiconductor industry cover the key considerations for graphite solutions e.g. enabling the growth of high-quality, defect-free SiC boules and epitaxy layers.
Our portfolio includes heaters, support crucibles, heat shields and insulation components for many single crystal-growing processes and materials. We also supply susceptors for silicon epitaxy and MOCVD. Known for our consistently high quality and individualized production, we offer application-specific finishing through cleaning, mechanical processing or coating.
|SGL CARBON GmbH
53170 Bonn - Germany
|The Showa Denko Group started its operations by focusing on the future possibilities of the electrochemical industry, which utilized one of Japan's important resources: abundant water energy. Originating from electrochemistry, our Group’s technology further evolved to cover the fields of inorganic chemistry, organic chemistry and metal materials. Today, the technology is inherited to wide variety of products that are essential in everyday life, including materials and components used in the information/telecommunication industry and the automotive industry.|
Showa Denko K.K., Japan supports development and manufacturing for SiC epitaxial wafers, which are the main raw materials for SiC power devices. With a global marketing and business support structure, we are offering our SiC epitaxial wafers worldwide.
|Showa Denko Europe GmbH
81829 Munich - Germany
Phone: +49 89 939962-15
|Silvaco is a leading EDA tools and semiconductor IP provider used for process and device development for advanced semiconductors, power IC, display, memory, and SoC design. For over 35 years, Silvaco has enabled its customers to develop next generation semiconductor products in the shortest time with reduced cost. The company is headquartered in Santa Clara, California and has a global presence with offices located in North America, Europe, Japan, China, Taiwan, Korea, and Singapore.||Silvaco Europe Ltd
St Ives, PE27 5JL, UK
Phone: +44 1480 484400
|At SK Siltron CSS, we provide the global compound semiconductor industry with a reliable source of leading-edge, production-proven, high-crystal, quality silicon carbide (SiC) wafers and epitaxy services.|
Our SiC technology and manufacturing expertise extends from crystal growth through wafer fabrication and epitaxy. We focus our R&D efforts on finding environmentally friendly solutions using renewable energy and sustainable manufacturing practices. Our latest-generation, wide-bandgap semiconductor materials are designed to help customers meet global demands for improved environmental sustainability, increased electricity demand and higher energy efficiency.
Drawing on decades of experience providing SiC materials and products, we continue to grow and double our capacity year over year. As a dedicated materials supplier, we focus on providing wafers and materials for critical compound semiconductor applications. We do not make devices or compete with our customers. We are backed by the resources and purchasing power of SK siltron.
SK Siltron CSS is a subsidiary of SK Siltron, which is part of SK Group, based in South Korea. As part of a broader SK conglomerate, we also have access to global perspectives and resources that help us fulfill our vision for each of the markets we enter.
|SK Siltron CSS
5300 Eleven Mile Road,
Auburn, MI 48611 USA
|Soitec designs and delivers innovative substrates and solutions to enable their customers' products shaping everyday life. Soitec develops standards across multiple segments and applications for nearly 30 years; 5G, automotive, datacenters, smartphones, IoT.||SOITEC
Parc Technologique des Fontaines
Chemin des Franques
38190 Bernin - France
Phone: +33 (0)4 76 92 75 00
|SOMOS SAS is a manufacturer of special-purpose machines for grinding, fine grinding, lapping and polishing of highest precision surfaces from softer to hardier materials. |
Beginning in 1901 with the manufacture of machines to produce precision optical components, the group has responded to the needs of evolving technologies and growth in other market sectors and now offers the most advances, automatic, flexible, computer-controlled machines and systems to serve the entire field of fine grinding, lapping and polishing.
SOMOS not only designs and manufactures machines and automated systems for high precision surfacing and diamond machining of hard materials (including carbides, glass, quartz, sapphire, crystals, metals, sintered materials, ceramics) but also develops processes and consumables and is a leading contract and machining and surfacing source for intermediate and high volumes of hard material components.
The SOMOS offer includes single and double- sided machines, plane, parallel plane, spherical, convex and concave from 220mm to 2500mm diameter and more.
|SOMOS - NANOTEC
20 Avenue des Temps Modernes
86360 Chasseneuil du Poitou - France
Phone: +33 (0)9 72 34 85 41
|With its unique V-grooved SiC MOSFET technology of high channel mobility at (0338) face, Sumitomo Electric achieves low state-on resistance and low switching loss, bringing forth the next generation SiC devices. And with over 40 years’ experience as global compound semiconductor manufacturer, Sumitomo Electric offers outstanding SiC Epitaxial wafer “EpiEra™” quality with impressive ZERO defect area. Having successfully commercialized 150mm (6-inch) diameter substrate “CrystEra™”, Sumitomo strengthen its position in SiC market by offering stable supply and vertical integration.||Sumitomo Electric Industries, Ltd.
|As a leading global company of semiconductor and flat panel display (FPD) production equipment, Tokyo Electron (TEL) engages in development, manufacturing, and sales in a wide range of product fields. All of TEL's semiconductor and FPD production equipment product lines maintain high market shares in their respective global segments. TEL provides outstanding products and services to customers through a global network in the U.S., Europe, and Asia.||Tokyo Electron Ltd.
Akasaka Biz Tower
3-1 Akasaka 5-chome
Minato-ku, Tokyo 107-6325 - Japan
|Toray Research Center, Inc. provides you with analysis services using a variety of techniques. Our superior ability to meet the problem-solving requirements of clients is based on a long track record and extensive experience in analysis and material evaluation. We will show you our analytical techniques and some examples of our application results.||Toray Research Center, Inc.
|Toyota Tsusho Corporation and Kwansei Gakuin University have successfully developed "Dynamic AGE-ing®", a surface nano-control process technology that neutralizes defects* in substrates composed of SiC, which is a next-generation power semiconductor material. This highly-innovative technology, which simultaneously achieves better quality and better productivity of SiC substrate, has now completed performance verification on 6-inch SiC substrates. SiC substrates are expected to be in great demand in a wide range of fields such as the global auto industry, which is swiftly shifting to electric vehicles, and a material that will contribute to a future carbon-free society. Samples have started to be supplied to semiconductor device manufacturers where evaluation and verification will proceed in preparation for the technology's introduction into mass production lines. At the same time, development aimed at applying this technology to large-diameter 8-inch SiC substrates has also been accelerated.|
We start supplying SiC substrate samples that apply Dynamic AGE-ing® in the second half of 2021. and proceed with evaluation and verification aimed at practical application in collaboration with semiconductor device manufacturers. Going forward, with the aim of establishing mass production at an early stage, business partners will be extensively sought to enable the supply of high-quality, highly-competitive 6-inch SiC substrates to a wide range of user companies, especially in the automotive field. Meanwhile, development aimed at the application of Dynamic AGE-ing® to large-diameter 8-inch SiC substrates will also be accelerated at the same time.
|Toyo Tanso is a high-performance graphite manufacturing company that has the world's largest production capacity with the latest equipment and unique technology, and also develops various technical services such as product design, analysis and verification.|
In addition to heaters and crucibles with high purity and excellent heat resistance, SiC coating material on graphite surface for the purpose of reducing the amount of degassing, dust generation and impurities on the surface of graphite material, etc, we have various graphite materials and surface treatment materials.
Based on the wealth of knowledge we have gained so far, we will strive to make new proposals and solve problems that accurately capture the needs of our customers, based on the wealth of accumulated data and flexible ideas.
Please feel free to contact from the inquiry form, if you need any solution about graphite.
|TOYO TANSO CO., LTD.
5-7-12 Takeshima, Nishiyodogawa-ku
Osaka 555-0011, JAPAN
|TRUMPF Hüttinger is a leading global manufacturer that provides current with the required frequency and power – no matter whether for plasma applications, induction heating or CO2 laser excitation. The standard portfolio offers a broad range of power supplies for processes requiring medium, radio- and microwave frequency. The new generation of bidirectional and modular inverters from TRUMPF Hüttinger was developed especially for the energy-efficient operation of redox flow and lithium-ion battery systems.|
TRUMPF Hüttinger offers process power solutions all along the semiconductor value chain: Our induction heating systems power crystal growth and epitaxy processes, our DC and RF systems are the essential component for wafer deposition and etching tools to ensure the production of homogeneous and defect-free layers and features.
TRUMPF Hüttinger has sales and service subsidiaries in Europe, the US and Asia. Headquarter of the company is in Freiburg im Breisgau, Germany.
|TRUMPF Hüttinger GmbH + Co. KG
Boetzinger Strasse 80
79111 Freiburg, GERMANY
|Wolfspeed, A Cree Company, is driving innovation with the industry’s broadest range of SiC and GaN materials. With more than 30 years of development and manufacturing experience, we are a fully integrated materials supplier with the largest and most diverse product portfolio serving a global customer base with a broad range of applications.|
As the technology commercialization leader, Wolfspeed combines industry-leading volume, scale, quality and a vast intellectual property portfolio to be the partner of choice for those looking for the best and most innovative materials.
Visit www.wolfspeed.com/materials to learn more.
|Wolfspeed, A Cree Company
4600 Siicon Dr
27703 Durham, NC - USA
|X-FAB continues to drive the adoption of silicon-carbide (SiC) technology forward by offering SiC foundry services at the scale of silicon. As the first pure-play foundry to offer internal SiC epitaxy and with a proven ability to run silicon and SiC on the same manufacturing line, our customers have access to high-quality and cost-effective foundry solutions. In line with the growing demand, we are committed to further expand our SiC capacity and, with the 26k wafers per month capacity at our Lubbock facility, have the right platform to meet our customers’ needs. |
With our site in Texas focused on serving the SiC market, the company is fully prepared for the expected acceleration of SiC device shipments – enabling key applications, such as electric vehicles and advanced power management systems. It allows customers to import their SiC projects into a stable and trusted, fully automotive-qualified fab environment which supports output levels that are comparable with those of IDMs.
2301 N. University Ave.
Lubbock, TX 79415 - USA