|II-VI Incorporated, a global leader in engineered materials and optoelectronic components, is a vertically integrated manufacturing company that develops innovative products for diversified applications in communications, materials processing, aerospace & defense, semiconductor capital equipment, life sciences, consumer electronics, and automotive markets. Headquartered in Saxonburg, Pennsylvania, the Company has research and development, manufacturing, sales, service, and distribution facilities worldwide. The Company produces a wide variety of application-specific photonic and electronic materials and components, and deploys them in various forms, including integrated with advanced software to support our customers.||II-VI Incorporated
14532 Kleinmachnow - Germany
|3D-Micromac AG is the industry leader in laser micromachining. We develop processes, machines and turnkey solutions at the highest technical and technological level. |
3D-Micromac systems have been successfully implemented in various high-tech industries worldwide. This includes semiconductor, photovoltaic, electronics, micro diagnostics, glass and display industry. Our aim is to provide superb customer satisfaction even for the most complex projects.
For semiconductor industry, 3D-Micromac continuously works on innovative laser processes and solutions that are not only ensuring but also further enhancing semiconductor device yields. 3D-Micromac machines help to add more functionality on devices within a smaller footprint. With its microDICE laser micromachining system 3D-Micromac addresses critical needs of the semiconductor industry by leveraging TLS-Dicing (thermal laser separation) for wafer dicing. With its microPRO OCF 3D-Micromac also offers a selective laser annealing system for ohmic contact formation (OCF) in silicon carbide (SiC) power devices.
09126 Chemnitz - Germany
Phone: +49 371 40043-922
|AIXTRON is a leading provider of deposition equipment to the semiconductor industry. The Company's technology solutions are used by a diverse range of customers worldwide to build advanced components for electronic and opto-electronic applications based on compound semiconductor materials as well as carbon nanotubes (CNT) and other 2D nanomaterials. Such components are used in fiber optic communication systems, wireless and mobile telephony applications, optical and electronic storage devices, computing, signaling and lighting, as well as a range of other leading-edge technologies.|
AIXTRON’s product portfolio includes:
• MOCVD Equipment based on the Planetary Reactor® or Close Coupled Showerhead® concept for compound semiconductor materials.
• Warm-Wall CVD systems for high-temperature SiC applications and research systems.
• MOCVD, CVD and Plasma Enhanced CVD systems for the deposition of carbon nanotubes and nanofibers.
52134 Herzogenrath - Germany
Phone: +49 2407-9030-0
|Annealsys manufactures Rapid Thermal Processing and Chemical Vapor Deposition systems for R&D and production. Process service is also available.|
RTP / RTPCVD systems with vacuum and high temperature capability up to 2000°C. Pulse annealing for processing thermally sensitive substrates. Applications: contact annealing, oxidation, CVD of graphene and h-BN, selenization, silicon carbide implant annealing.
DLI-CVD / DLI-ALD systems with direct liquid injection (DLI) vaporizers for deposition of materials using the widest range of organometallic precursors. Multi process capability 2-inch system: DLI-CVD, DLI-ALD and RTP inside the same chamber. Applications: multi-metallic oxides, metals, nitrides, 2D materials.
Annealsys represents Veeco-CNT for ALD systems.
139 rue des Walkyries
34000 Montpellier - France
Phone: +33 (0)4 67 20 23 63
|Ascatron provides high performance Silicon Carbide (SiC) epi wafers and power semiconductors. We design power diodes, MOSFETs and other type of SiC devices for a wide range of voltages based on our unique 3DSiC® material technology. Prototyping and pilot production of device chips is done in-house, while volume production is setup at automotive qualified foundry. Ascatron is a Sweden based company with background in producing advanced SiC epitaxy material for global customers since 2011.||Ascatron AB
Isafjordsgatan 22 (B, plan 5)
SE-16440 Kista, Stockholm - Sweden
Phone: +46 70 79 27 809
|Beneq is the home of ALD, offering a wide portfolio of equipment products and development services. Today Beneq leads the market with innovative solutions for advanced R&D (TFS 200, R2), flexible high-volume manufacturing (BENEQ TransformTM), ultra-fast high precision spatial ALD coatings (C2R), roll-to-roll thin film coating of continuous webs (WCS 600), and specialized batch production for thicker film stacks (P400, P800). Headquartered in Espoo, Finland Beneq is dedicated to making ALD technology accessible for researchers and enabling technology mega trends through engineered ALD materials solutions.||Beneq
02200 Espoo - Finland
Phone: +358 9 7599 530
|Centrotherm has been developing and realizing innovative thermal solutions for over 70 years. As a leading and globally operating technology group, we offer comprehensive production solutions for the semiconductor and microelectronic industries. In the field of 150 mm SiC processing, centrotherm has an outstanding reputation. It has been selected and qualified as technology provider for REACTION – First and European SiC eight inches pilot line.|
Our equipment is designed for all needs from R&D to mass production and applicable for various semiconductor technologies and applications, such as logic and memory devices (e.g. Flash, DRAM), power semiconductors (e.g. Si, SiC), LED, SMT, MEMS or sensor technology. The centrotherm product portfolio comprises horizontal (up to 300 mm wafer diameter) and vertical batch furnaces (atmospheric or vacuum processes), high temperature furnaces (annealing up to 2000°C, oxidation up to 1500°C), single wafer systems (RTP, low-temperature microwave oxidation).
Additionally we offer vacuum soldering systems and conveyor furnaces for thermally activated processes, such as thick film processes (drying and sintering) or DCB (remelting and connection), LTCC and MLCC manufacturing (firing).
|Centrotherm International AG
Württemberger Str. 31
89143 Blaubeuren - Germany
Phone: +49 7344 918 0
|DISCO is a total solution provider for Dicing (Kiru), Grinding (Kezuru) and Polishing (Migaku) technologies. |
KABRA is our new solution for SiC wafer production that can overcome the issues with the conventional wire saws. KABRA process includes SiC ingot slicing by laser, and precision grinding of ingot and split wafer sides. Advantages are more wafers obtainable from one ingot due to less material loss, no need of lapping process, and much faster processing time.
|DISCO HI-TEC EUROPE GmbH
85551 Kirchheim b. München - Germany
Phone: +49 (0)89 90903 203
|Entegris is a leader in specialty chemicals and advanced materials solutions for the microelectronics industry and other high-tech industries. Entegris material suite includes Supersic, a unique process that yields high purity SiC , in alignment with our mission of contamination control. Sinmat the latest addition to Entergris business capabilities is a leader in the design and production of Chemical Mechanical Planarization (CMP) slurries used for polishing ultra-hard surface materials, including SiC and GaN. The combination of Sinmat’s slurry technology with Entegris broad capabilities in CMP cleans, filtration and applications technology enable new solutions for CMP customers.||ENTEGRIS | SINMAT
950 W. Elliot Road - Suite 114
85284 Tempe, Arizona - United States
Phone: +1 800 394 4083
|To meet the need for larger epi-wafers, Epiluvac has developed the first commercially available SiC epitaxy reactor for up to 200 mm (8”) wafers, the “Epiluvac ER3”. It offers features like automatic hot wafer loading/unloading for high throughput and fine tuning of cell temperature for best possible uniformity. The new reactor can be configured in single or multiple chamber configurations which enables upscaling of capacity or sequenced wafer processing.|
Epiluvac is a Swedish company founded by a team of former Epigress/Aixtron engineers. The company offers CVD reactors for Wide Band Gap (WBG) semiconductors. Main applications are epitaxial growth of silicon carbide (SiC) and gallium nitride (GaN). The engineering team has decades of experience from research and development of CVD reactors and especially hot-wall CVD tools for SiC epitaxy. Epiluvac provides standard as well as customized reactor solutions and a wide range of service and maintenance packages.
Ideon Science Park, Delta 6
SE-22370 Lund - Sweden
Phone: +46 462 88 02 20
|GT Advanced Technologies manufactures CrystX™ silicon carbide for producers of wafers and power electronics. The 150 mm 4H Nitrogen-doped slicing-ready pucks feature a usable height of greater than 25mm, fewer than 0.5 micropipes per cm2, and a resistivity specification of 20 ±5 mΩ-cm (tunable to a 2mΩ-cm range upon request). GTAT is at-scale now for supplying production volumes of CrystX silicon carbide, and has an aggressive cost-down roadmap to accelerate adoption in key global industries such as electric vehicles and other power-electronics applications.||GT ADVANCED TECHNOLOGIES
5 Wentworth Drive, Unit 1
Hudson, NH 03051 - USA
Phone: +1 603.883.5200
|A global expert in electrical power and advanced materials, Mersen designs innovative solutions to address its clients’ specific needs and enable them to optimize their manufacturing performance. |
Mersen’s 6,400 employees operating in 35 countries provide purpose-designed solutions bespoke to customer requirements anywhere on the planet.
Our material expertise on graphite, carbon insulation, carbon/carbon composite, flexible graphite and silicon carbide (SiC) gives us the possibility to engineer enhanced solutions for demanding applications such as industrial processes for semiconductors – crystal growth and wafer processing notably -, aerospace, solar PV, LEDs, as well as in energy storage.
41 rue Jean-Jaurès
92239 Gennevilliers - France
|Built over three generations with high involvement and dedication, Microdiamant is a family-run company headquartered in Lengwil, Switzerland. By today, Microdiamant has evolved to be Europe’s largest diamond micronizer and ranks among the top three worldwide for micron diamond powders. Its products and services are distributed through a network of specialized agents with subsidiaries and partners in around 20 countries across Europe, the USA and Asia. As a full-spectrum supplier, the company offers solutions used in a variety of industries such as the Precision Industry, Electronics and Optics, Medtech, Tooling and Coatings as well as Luxury Goods. With the services offered in its Surface Lab, Microdiamant not only follows its guiding principle of creating something new and better but also answers to the sectors’ demand for specialists in optimizing and developing fine grinding, lapping and polishing processes.||MICRODIAMANT AG
8574 Lengwil - Switzerland
Phone: +41 71 686 60 60
|Nanotronics is a science technology company that has redefined factory control through the invention of a platform that combines AI, automation and sophisticated imagining to assist human ingenuity in detecting flaws and anomalies in manufacturing, an industry that has been stagnant since the 1950’s. Deployed across eight countries and industry agnostic, we work with leading-edge companies - from aerospace, to electronics, to healthcare - to drive up yield, reduce footprint and waste, lower costs, and speed up design iteration. |
Nanotronics is a key player in helping to solidify New York’s role as a global center of the innovation economy. We are currently building New York’s first high tech manufacturing hub in the Brooklyn Navy Yard, with expected completion in Q2, 2020.
19 Morris Avenue
Brooklyn, NY 11205 - USA
Phone: +1  207 9959
|Nissin Ion Equipment aims at promoting a development-based business through the manufacture of various equipment at the core of which are proprietary ion beam and plasma technologies.|
We has addressed the needs brought about by the rise of environmental awareness into our equipment development and marketing with a high temperature ion implanter for mass production.
This product is for the manufacture of semiconductor power units that are attracting attention in their application withelectric power equipment due to their ability to more efficiently handle high voltages and high currents in comparison with conventional semiconductor devices.
Such semiconductor power devices are also being used in EV and HEV vehicles and home appliances for the purpose of saving energy.
|NISSIN ION EQUIPMENT Co., Ltd.
Kyoto 601-8205 Japan
Phone: +81 75-934-8412
|NOVASiC provides SiC epitaxy and wide bandgap polishing services. NOVASiC also provides 4H-SiC on 4H-SiC and 3C-SiC epitaxy on silicon - useful templates for nitride growth. We specialize in high-quality polishing of SiC, GaN, AlN, Ga2O3, diamond, ZnO... |
Our polishing is widely recognized as the industry's benchmark. NOVASiC provides reclaim, planarization and thinning services - from removing as little as 1.000 Å to thinning substrates to 150 microns, or even less.
NOVASiC’s headquarters are in the French Alps, near Grenoble.
Allée du Lac d'Aiguebelette
73375 Le Bourget du Lac Cedex - France
Phone: +33 (0)4 79 65 97 20
|NuFlare Technology, Inc. was founded in 2002 as a spinoff of Toshiba Machine Co. Ltd. Since that time, we have developed and provided state-of-the-art electron beam mask writers, mask inspection systems and epitaxial growth systems for the manufacture of semiconductor devices, thereby contributing to the development of the semiconductor industry.|
Epitaxial growth systems for power devices are expected to find more widespread use in electric vehicles (EVs) and other applications.
Epitaxial growth systems are currently moving from the development phase to use in practical applications.
For manufacturing of power devices based on 4H-SiC, CVD tools of excellent uniformity of both thickness and carrier concentration on n-type homo-epitaxial films as well as of high productivity have been required. We have developed a CVD tool,"EPIREVO S6", based on high speed wafer rotation technology which is suitable for achieving high in-wafer uniformity and high growth rate.
|NuFlare Technology, Inc. (NFT)
8-1, Shinsugita-cho, Isogo-ku
Yokohama-shi, 235-8522 Kanagawa - Japan
|Plasma-Therm is a global manufacturer of advanced plasma-processing equipment, provides etch, deposition, and plasma dicing technologies used in semiconductor packaging, solid-state lighting, power, data storage, renewable energy, MEMS, nanotechnology, photonics, and wireless communication markets.|
Plasma-Therm's products have been adopted globally and earned their reputation for value, reliability, and world-class support.
10050 16th St. North
St. Petersburg, FL 33716 - United States
Phone: +1 727 577 4999
|PR Hoffman Machine Products Inc. is a manufacturer of double sided and single sided Lapping and polishing machines, lapping and polishing carriers and single side polishing templates. Our newest line of double side and single side processing equipment is designed specifically with all the essential options and controls for Silicon Carbide DSP and CMP processing. We have worked closely with the materials engineers to ensure our new equipment will offer a premium wafer and competitive cost of ownership. PR Hoffman offers experienced sales and engineering staff to help you customize the best solution for all of your lapping and polishing processing needs. Consumables, offered for all brands of machines, are specifically designed for each customer application to ensure the carriers and templates are providing the best cost of ownership for each customer’s unique process. Our equipment is used across many industries including Compound Substrates, Silicon, Quartz, Ceramics, Optics, Medical and Metals. Since 1938, PR Hoffman has been a leader in the lapping and polishing industry.||PR Hoffman Machine Products Inc.
1517 Commerce Avenue,
Carlisle PA, USA 17015
Phone: +1 717-243-9900
|Demand for SiC substrates is growing as the demand for SiC-based power and RF devices increases. Yet the adoption of SiC is slowed by cost and by the difficulty of processing the material.|
Revasum has developed a streamlined grind and polish process that eliminates conventional lapping and diamond polishing steps and the associated issues. Revasum’s solution reduces the overall cost to manufacture SiC substrates, in addition to improving quality, productivity and yield removing two barriers to more rapid growth in demand for SiC.
SiC is a hard material to process. Revasum understands the challenges of working with SiC and has applied our knowledge of SiC grinding, prime silicon substrate polishing and CMP, to develop a unique solution that truly makes polishing SiC easy.
The 6EZ can polish and clean both faces of 50 SiC substrates sequentially, without any operator intervention. Combining the 6EZ with Revasum’s fully-automated 7AF-HMG grinder, the entire process flow from wire slicing or laser splitting to EPI is synchronized to provide optimum performance and high yields at an affordable cost per wafer delivering a production-ready solution for 150mm and 200mm SiC substrate and device manufacturing.
825 Buckley Road, San Luis Obispo
CA 93401 - United States
Phone: +1 805 782 5325
|Semilab is a leading metrology equipment supplier for characterization of semiconductor materials. The company offers advanced electrical and optical systems, for both R&D and production control in the semiconductor, photovoltaic, and display technology markets. Technologies for compound and wide bandgap semiconductors include ellipsometry, dopant concentration and profiling, electrical characterization of dielectrics and interfaces, photoluminescence, Raman, mobility, sheet resistance, contamination control, and atomic force microscopy. Electrical techniques include both contact and non-contact solutions, and all are offered in a range of platforms from smaller manual type tools to fully automated production control systems with high-resolution imaging.||SEMILAB SEMICONDUCTOR PHYSICS LABORATORY COMPANY LTD.
Prielle Kornelia U.4/A
1117 Budapest - Hungary
Phone: +36 1 505 4690
|The Showa Denko Group started its operations by focusing on the future possibilities of the electrochemical industry, which utilized one of Japan's important resources: abundant water energy. Originating from electrochemistry, our Group’s technology further evolved to cover the fields of inorganic chemistry, organic chemistry and metal materials. Today, the technology is inherited to wide variety of products that are essential in everyday life, including materials and components used in the information/telecommunication industry and the automotive industry.|
Showa Denko K.K., Japan supports development and manufacturing for SiC epitaxial wafers, which are the main raw materials for SiC power devices. With a global marketing and business support structure, we are offering our SiC epitaxial wafers worldwide.
|SHOWA DENKO EUROPE GmbH
81829 Munich - Germany
Phone: +49 89 939962-15
|SK Siltron CSS, a subsidiary of South Korea-based SK Siltron and the SK Group, offers a reliable global source of leading-edge, production-proven, high-crystal-quality silicon carbide (SiC) wafers and epitaxy services. |
SK Siltron has been part of the semiconductor industry in Korea and elsewhere for more than 35 years, pursuing global leadership in semiconductor development through fundamental competitive innovation in technology, manufacturing, infrastructure and talented people. Recent acquisition of state-of-the-art technologies for SiC wafer production from DuPont extends the company’s capabilities in developing and manufacturing semiconductor wafers.
As a vertically integrated SiC material supplier with technology and manufacturing expertise from crystal growth through wafer fabrication and epitaxial growth, SK Siltron CSS is well-positioned to provide technology to meet demands linked to global megatrends – including improved environmental sustainability, increased electricity demand and higher energy efficiency – through the latest generation of wide-bandgap semiconductor materials.
|SK Siltron CSS
5300 Eleven Mile Road,
Auburn, MI 48611 USA
|As a leading global company of semiconductor and flat panel display (FPD) production equipment, Tokyo Electron (TEL) engages in development, manufacturing, and sales in a wide range of product fields. All of TEL's semiconductor and FPD production equipment product lines maintain high market shares in their respective global segments. TEL provides outstanding products and services to customers through a global network in the U.S., Europe, and Asia.||Tokyo Electron Ltd.
Akasaka Biz Tower
3-1 Akasaka 5-chome
Minato-ku, Tokyo 107-6325 - Japan
|Wolfspeed, A Cree Company, is driving innovation with the industry’s broadest range of SiC and GaN materials. With more than 30 years of development and manufacturing experience, we are a fully integrated materials supplier with the largest and most diverse product portfolio serving a global customer base with a broad range of applications.|
As the technology commercialization leader, Wolfspeed combines industry-leading volume, scale, quality and a vast intellectual property portfolio to be the partner of choice for those looking for the best and most innovative materials.
Visit www.wolfspeed.com/materials to learn more.
|Wolfspeed, A Cree Company
4600 Siicon Dr
27703 Durham, NC - USA
|X-FAB continues to drive the adoption of silicon-carbide (SiC) technology forward by offering SiC foundry services at the scale of silicon. As the first pure-play foundry to offer internal SiC epitaxy and with a proven ability to run silicon and SiC on the same manufacturing line, our customers have access to high-quality and cost-effective foundry solutions. In line with the growing demand, we are committed to further expand our SiC capacity and, with the 26k wafers per month capacity at our Lubbock facility, have the right platform to meet our customers’ needs. |
With our site in Texas focused on serving the SiC market, the company is fully prepared for the expected acceleration of SiC device shipments – enabling key applications, such as electric vehicles and advanced power management systems. It allows customers to import their SiC projects into a stable and trusted, fully automotive-qualified fab environment which supports output levels that are comparable with those of IDMs.
2301 N. University Ave.
Lubbock, TX 79415 - USA
Phone: +1 408 844 0066